Vacuum technology, 5 credits

RECOMMENDED PREREQUISITES

Basic knowledge of physics and chemistry at the undergraduate level.

LEARNING OUTCOMES

• The general course objective is to provide basic theoretical and practical knowledge of vacuum technology and the equipment that is used in vacuum- and thin film technology.
• The course will provide knowledge and thorough understanding of vacuum technology and link it to related scientific areas demonstrating the interdisciplinary scientific nature of vacuum technology.
• Give methodological and practical skills in scientific areas related to vacuum technology. This is achieved by linking fundamental theory to practical problems and challenges.

LEARNING OUTCOMES FOR DOCTORAL DEGREE 

The course will address several PhD examination goals, such as good subject knowledge and scientific methodological skills.
Since vacuum technology is an integral part in many synthesis and analysis equipment, the students will obtain a general knowledge within their research area as well as a higher level of systematic understanding within a defined part of their research area. The course will also increase the insights into the possibilities and limitations of science.
Further, the course aims at providing knowledge and understanding of the general relationships between different quantities in vacuum technology which will give the students familiarity with the vacuum based scientific methodology in general.

COURSE CONTENTS

The lectures will focus on the following subjects: Definition of pressure and how it can be measured, the different gas flow regimes, the materials used in vacuum equipment, different vacuum pumps and manometers, construction of vacuum systems, and residual gas analysis.

INSTRUCTION

There will eight lectures (each 2*45min) and at the end of the course there will be a written examination.

ASSESSMENT

Written examination.

COURSE EXAMINER

Tomas Nyberg, tomas.nyberg@angstrom.uu.se

DEPARTMENT WITH MAIN RESPONSIBILITY

Department of Electrical Engineering

CONTACT PERSON/S 

Tomas Nyberg, tomas.nyberg@angstrom.uu.se

APPLICATION

Submit the application for admission to: Tomas Nyberg, Ångström Laboratory, Box 65, 751 03 Uppsala or e-mail to tomas.nyberg@angstrom.uu.se
Submit the application not later than: 2023-09-30